菜單
產品展示
● X-Y?travel?coarse? ? ? ? ? ?200?mm?x?200?mm?
● X-Y?travel?fine? ? ? ? ? ? ? ? 10?mm?x?10?mm?（resolution?
● Z??up/down? ? ? ? ? ? ? ? ? ? 10?mm?
● Theta?travel? ? ? ? ? ? ? ? ? ? ±?7o?
● Planarity ????????????????????????
● Z?travel? ? ? ? ? ? ? ? ? ? ? ? ? ?25mm?
● resolution? ? ? ? ? ? ? ? ? ? ? ?
● X-Y travel coarse 200 mm x 200 mm
● X-Y travel fine 10 mm x 10 mm （resolution < 1 μm）
● Z up/down 10 mm
● Theta travel ± 7o
● Planarity < ± 5μm
● Z travel 25mm
● resolution < ± 1 μm
● Travel rangeX-Y-Z 50 mm x 50 mm x 50 mm
● Resolution <1um
● Power 220V, 50Hz
● Vacuum -0.8 bar
● Compressed air 4 bar
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